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大气压介质阻挡放电超四边形斑图的等离子体参量

陈俊英 董丽芳 李媛媛 宋倩 嵇亚飞

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大气压介质阻挡放电超四边形斑图的等离子体参量

陈俊英, 董丽芳, 李媛媛, 宋倩, 嵇亚飞

Plasma parameters of square superlattice pattern in a dielectric barrier discharge

Chen Jun-Ying, Dong Li-Fang, Li Yuan-Yuan, Song Qian, Ji Ya-Fei
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  • 本工作利用双水电极介质阻挡放电装置,采用发射光谱方法,在大气压氩气介质阻挡放电中研究了由不同空间尺度 微放电通道构成的超四边形斑图的等离子体参量.实验发现直径较大的微放电通道(大点)和直径较小的微放电通道(小点)亮度不同.采用氮分子第二正带系谱线计算了分子振动温度,利用谱线强度比方法得到了电子激发温度,用氩原子696.54 nm谱线的Stark展宽估算了电子密度.结果显示小点的电子密度和分子振动温度均高于大点,而电子激发温度低于大点.这说明稳定超四边形斑图中不同尺度微放电的等离子体状态不同.
    Dielectric barrier discharge is an important method of producing nonequilibrium low-temperature plasma. Measurement of the plasma parameters is highly valuable for its industrial application. Plasma parameters of square superlattice pattern are investigated by optical emission spectroscopy in a dielectric barrier discharge by using a two-liquid-electrode dielectric barrier discharge device in argon at atmospheric pressure. It is found that the light intensity of the large diameter microdischarge channel(big dot) is different from that of the small diameter channel (small dot). Vibrational temperature is investigated by using the N_{2} second positive spectrum. Electronic excitation temperature is measured by means of spectral line intensity ratio. Electron density is obtained by using the stark broadening of Ar atom 696.54 nm spectral line. The results show that the electron density and the vibrational temperature of the small dot are larger than those of the big dot but the electronic excitation temperature is lower than that of the big dot. It is suggested that the plasma state of the big dot is different from that of the small dot in the stable square superlattice pattern.
    • 基金项目: 国家自然科学基金(批准号: 10975043),河北省自然科学基金(批准号: 2010000185),河北省教育厅重点项目(批准号: ZD2010140)和 2010年度高等学校博士学科点专项科研基金资助课题(批准号: 20101301110001)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 10975043 ), the Natural Science Foundation of Hebei Province, China (Grant No. A2010000185 ), the Key project of Department of Education of He-bei Province (Grant No. ZD2010140), and the Specialized Research Fund for the Doctoral Program of Higher Education (Grant No. 20101301110001).
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    [7]

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    Masoud N, Martus K, Figus M, Becker K 2005 Contrib. Plasma Phys. 45 30

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    Nersisyan G, Graham W G 2004 Plasma Sources Sci. Technol. 13 582

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    Kozlov K V,Wagner H E, Brandenburg R, Michel P 2001 J. Phys. D: Appl. Phys. 34 3164

    [13]

    Davide Mariotti, Yoshiki Shimizu, Takeshi Sasaki, NaotoKoshizaki 2006 Appl. Phys. Lett. 89 201502

    [14]

    Torres J, Palomares J M, Sola A, J J A M vander Mullen, Gamero A 2007 J. Phys. D: Appl. Phys. 40 5929

    [15]

    Dong L F, Ran J X, Mao Z G 2005 Appl. Phys. Lett. 86 161501

    [16]

    Dong L F, Qi Y Y, Zhao Z C, Li Y H 2008 Plasma Sources Sci. Technol. 17 015015

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    Dong L F, Ran J X, Mao Z G 2005 Acta Phys. Sin. 54 2167 (in Chinese) [董丽芳, 冉俊霞, 毛志国 2005 54 2167]

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    Potekhin A Y, Chabrier G, Gilles D 2002 Phys. Rev. E 65 1

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    Dong L F, Qi Y Y, Liu W Y, Fan W L 2009 J. Appl. Phys. 106 013301

  • [1]

    Kogelschatz U 2002 IEEE Trans on Plas. Sci. 30 1400

    [2]

    S H Liu, Neiger M 2001 J. Phys. D: Appl. Phys. 34 1632

    [3]

    Hao Y P, Yang L, Tu E L, Chen J Y, Zhu Z W, Wang X L 2010 Acta Phys Sin. 59 2610 (in Chinese) [郝艳捧, 阳林, 涂恩来, 陈建阳, 朱展文, 王晓蕾 2010 59 2610]

    [4]

    Koichi T, Tamiya F 2001 IEEE Trans. on Plasma Sci. 29 518

    [5]

    Wang Y H, Wang D Z 2006 Acta Phys Sin. 55 5923 (in Chinese)王艳辉, 王德真 2006 55 5923]

    [6]

    Ouyang Q 2000 Pattern Formation in Reaction-Diffusion Systems (Shanghai: Shanghai Scientific & Technological Publishing Education House) (in Chinese) [欧阳颀\ 2000\ 反应扩散系统中的斑图动力学(上海:上海科技教育出版社)]

    [7]

    Pu Y D, Yang J M, Jin F T, Zhang L, Ding Y K 2011 Acta Phys Sin. 60 045210 (in Chinese) [蒲昱东, 杨家敏, 靳奉涛, 张璐, 丁永坤 2011 60 045210]

    [8]

    Masoud N, Martus K, Figus M, Becker K 2005 Contrib. Plasma Phys. 45 30

    [9]

    Nersisyan G, Graham W G 2004 Plasma Sources Sci. Technol. 13 582

    [10]

    Griem H R 1974 Spectral line broadening by plasmas (New York: Academic)

    [11]

    Kozlov K, Shepeliuk O, Monyakin A, Dobryakov V, Samoilovich V 1995 Experimental Proc. Annual Congress of the Polish Chemistry Society (Lublin, Poland) 79—83

    [12]

    Kozlov K V,Wagner H E, Brandenburg R, Michel P 2001 J. Phys. D: Appl. Phys. 34 3164

    [13]

    Davide Mariotti, Yoshiki Shimizu, Takeshi Sasaki, NaotoKoshizaki 2006 Appl. Phys. Lett. 89 201502

    [14]

    Torres J, Palomares J M, Sola A, J J A M vander Mullen, Gamero A 2007 J. Phys. D: Appl. Phys. 40 5929

    [15]

    Dong L F, Ran J X, Mao Z G 2005 Appl. Phys. Lett. 86 161501

    [16]

    Dong L F, Qi Y Y, Zhao Z C, Li Y H 2008 Plasma Sources Sci. Technol. 17 015015

    [17]

    Herzberg G Molecular Spectra and Molecular Structure I. Spectra of Diatomic Molecules (中译本,分子光谱与分子结构,第一卷:双原子分子光谱)(北京: 科学出版社), 1983, p155

    [18]

    Dong L F, Ran J X, Mao Z G 2005 Acta Phys. Sin. 54 2167 (in Chinese) [董丽芳, 冉俊霞, 毛志国 2005 54 2167]

    [19]

    Pellerin S, Musiol K, Pokrzywka B, Chapelle J 1996 J. Phys. B 29 3911

    [20]

    Potekhin A Y, Chabrier G, Gilles D 2002 Phys. Rev. E 65 1

    [21]

    Dong L F, Qi Y Y, Liu W Y, Fan W L 2009 J. Appl. Phys. 106 013301

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出版历程
  • 收稿日期:  2011-05-25
  • 修回日期:  2012-04-05
  • 刊出日期:  2012-04-05

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