Working principle and layout logic of closed magnetic field in sputtering

Cui Sui-Han; Guo Yu-Xiang; Chen Qiu-Hao; Jin Zheng; Yang Chao; Wu Zhong-Can; Su Xiong-Yu; Ma Zheng-Yong; Tian Xiu-Bo; Wu Zhong-Zhen

doi:10.7498/aps.71.20211781

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Cui Sui-Han, Guo Yu-Xiang, Chen Qiu-Hao, Jin Zheng, Yang Chao, Wu Zhong-Can, Su Xiong-Yu, Ma Zheng-Yong, Tian Xiu-Bo, Wu Zhong-Zhen. Working principle and layout logic of closed magnetic field in sputteringJ. Acta Physica Sinica, 2022, 71(5): 055203. DOI: 10.7498/aps.71.20211781

Citation:

Cui Sui-Han, Guo Yu-Xiang, Chen Qiu-Hao, Jin Zheng, Yang Chao, Wu Zhong-Can, Su Xiong-Yu, Ma Zheng-Yong, Tian Xiu-Bo, Wu Zhong-Zhen. Working principle and layout logic of closed magnetic field in sputteringJ. Acta Physica Sinica, 2022, 71(5): 055203. DOI: 10.7498/aps.71.20211781

Citation:

Cui Sui-Han, Guo Yu-Xiang, Chen Qiu-Hao, Jin Zheng, Yang Chao, Wu Zhong-Can, Su Xiong-Yu, Ma Zheng-Yong, Tian Xiu-Bo, Wu Zhong-Zhen. Working principle and layout logic of closed magnetic field in sputteringJ. Acta Physica Sinica, 2022, 71(5): 055203. DOI: 10.7498/aps.71.20211781