Mechanical strength of Czochralski silicon crystal: Effects of co-doping germanium and nitrogen

Sun Yu-Xin; Wu De-Fan; Zhao Tong; Lan Wu; Yang De-Ren; Ma Xiang-Yang

doi:10.7498/aps.70.20201803

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Sun Yu-Xin, Wu De-Fan, Zhao Tong, Lan Wu, Yang De-Ren, Ma Xiang-Yang. Mechanical strength of Czochralski silicon crystal: Effects of co-doping germanium and nitrogenJ. Acta Physica Sinica, 2021, 70(9): 098101. DOI: 10.7498/aps.70.20201803

Citation:

Sun Yu-Xin, Wu De-Fan, Zhao Tong, Lan Wu, Yang De-Ren, Ma Xiang-Yang. Mechanical strength of Czochralski silicon crystal: Effects of co-doping germanium and nitrogenJ. Acta Physica Sinica, 2021, 70(9): 098101. DOI: 10.7498/aps.70.20201803

Citation:

Sun Yu-Xin, Wu De-Fan, Zhao Tong, Lan Wu, Yang De-Ren, Ma Xiang-Yang. Mechanical strength of Czochralski silicon crystal: Effects of co-doping germanium and nitrogenJ. Acta Physica Sinica, 2021, 70(9): 098101. DOI: 10.7498/aps.70.20201803