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中国物理学会期刊
JU Guangxu, LIN Qihui, XU Erqi, WANG Xinqiang, GE Weikun, DONG Yuhui, XU Ke, SHEN Bo. Research progress of growth kinetics of nitride metal-organic chemical vapor deposition epitaxy under in situ X-ray characterizationJ. Acta Physica Sinica, 2026, 75(4): 040701. DOI: 10.7498/aps.75.20251197
Citation: JU Guangxu, LIN Qihui, XU Erqi, WANG Xinqiang, GE Weikun, DONG Yuhui, XU Ke, SHEN Bo. Research progress of growth kinetics of nitride metal-organic chemical vapor deposition epitaxy under in situ X-ray characterizationJ. Acta Physica Sinica, 2026, 75(4): 040701. DOI: 10.7498/aps.75.20251197

Research progress of growth kinetics of nitride metal-organic chemical vapor deposition epitaxy under in situ X-ray characterization

CSTR: 32037.14.aps.75.20251197
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