LYU Xiaowei, ZHANG Jiazhen, CHEN Junyu, LIU Zizhuo, ZHAO Wenchao, WU Qiushi, XU Hao, CHEN Xiaoshuang. Research progress of waveguide integrated carbon based infrared detectorsJ. Acta Physica Sinica, 2025, 74(20): 208101. DOI: 10.7498/aps.74.20250830