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中国物理学会期刊
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Zhang Yu-Han, Zhao Xin-Qian, Liang Ying-Shuang, Guo Yuan-Yuan. Numerical simulation of inductively coupled Ar/O2 plasmaJ. Acta Physica Sinica, 2024, 73(13): 135201. DOI: 10.7498/aps.73.20240436
Citation: Zhang Yu-Han, Zhao Xin-Qian, Liang Ying-Shuang, Guo Yuan-Yuan. Numerical simulation of inductively coupled Ar/O2 plasmaJ. Acta Physica Sinica, 2024, 73(13): 135201. DOI: 10.7498/aps.73.20240436
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Numerical simulation of inductively coupled Ar/O2 plasma

Acta Phys. Sin., 2024, 73(13): 135201.
DOI: 10.7498/aps.73.20240436
CSTR: 32037.14.aps.73.20240436
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