Yuan Guo-Liang, Wang Chen-Hao, Tang Wen-Bin, Zhang Rui, Lu Xu-Bing. Structure, performance regulation and typical device applications of HfO2-based ferroelectric filmsJ. Acta Physica Sinica, 2023, 72(9): 097703. DOI: 10.7498/aps.72.20222221