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中国物理学会期刊
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Jiang Zhong-Jun, He Wei, Chen Jing-Wei, Luo Dan-Yang, Yang Fan, Jiang Kai, Wang Liang. Fresnel diffraction lithographyJ. Acta Physica Sinica, 2023, 72(1): 014202. DOI: 10.7498/aps.72.20221533
Citation: Jiang Zhong-Jun, He Wei, Chen Jing-Wei, Luo Dan-Yang, Yang Fan, Jiang Kai, Wang Liang. Fresnel diffraction lithographyJ. Acta Physica Sinica, 2023, 72(1): 014202. DOI: 10.7498/aps.72.20221533
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Fresnel diffraction lithography

Acta Phys. Sin., 2023, 72(1): 014202.
DOI: 10.7498/aps.72.20221533
CSTR: 32037.14.aps.72.20221533
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