Fabrication of superconducting qubits and auxiliary devices with niobium base layer

Su Fei-Fan; Yang Zhao-Hua; Zhao Shou-Kuan; Yan Hai-Sheng; Tian Ye; Zhao Shi-Ping

doi:10.7498/aps.71.20211865

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Su Fei-Fan, Yang Zhao-Hua, Zhao Shou-Kuan, Yan Hai-Sheng, Tian Ye, Zhao Shi-Ping. Fabrication of superconducting qubits and auxiliary devices with niobium base layerJ. Acta Physica Sinica, 2022, 71(5): 050303. DOI: 10.7498/aps.71.20211865

Citation:

Su Fei-Fan, Yang Zhao-Hua, Zhao Shou-Kuan, Yan Hai-Sheng, Tian Ye, Zhao Shi-Ping. Fabrication of superconducting qubits and auxiliary devices with niobium base layerJ. Acta Physica Sinica, 2022, 71(5): 050303. DOI: 10.7498/aps.71.20211865

Citation:

Su Fei-Fan, Yang Zhao-Hua, Zhao Shou-Kuan, Yan Hai-Sheng, Tian Ye, Zhao Shi-Ping. Fabrication of superconducting qubits and auxiliary devices with niobium base layerJ. Acta Physica Sinica, 2022, 71(5): 050303. DOI: 10.7498/aps.71.20211865