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中国物理学会期刊
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Ji Jian-Wei, Kazuya Yamamura, Deng Hui. Plasma-assisted polishing for atomic surface fabrication of single crystal SiCJ. Acta Physica Sinica, 2021, 70(6): 068102. DOI: 10.7498/aps.70.20202014
Citation: Ji Jian-Wei, Kazuya Yamamura, Deng Hui. Plasma-assisted polishing for atomic surface fabrication of single crystal SiCJ. Acta Physica Sinica, 2021, 70(6): 068102. DOI: 10.7498/aps.70.20202014
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Plasma-assisted polishing for atomic surface fabrication of single crystal SiC

Acta Phys. Sin., 2021, 70(6): 068102.
DOI: 10.7498/aps.70.20202014
CSTR: 32037.14.aps.70.20202014
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