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Wang Chen, Xu Yi-Hong, Li Cheng, Lin Hai-Jun. Fabrication and characteristics of high performance SOI-based Ge PIN waveguide photodetectorJ. Acta Physica Sinica, 2017, 66(19): 198502. DOI: 10.7498/aps.66.198502
Citation: Wang Chen, Xu Yi-Hong, Li Cheng, Lin Hai-Jun. Fabrication and characteristics of high performance SOI-based Ge PIN waveguide photodetectorJ. Acta Physica Sinica, 2017, 66(19): 198502. DOI: 10.7498/aps.66.198502
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Fabrication and characteristics of high performance SOI-based Ge PIN waveguide photodetector

Acta Phys. Sin., 2017, 66(19): 198502.
DOI: 10.7498/aps.66.198502
CSTR: 32037.14.aps.66.198502
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