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中国物理学会期刊
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Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu. Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequencyJ. Acta Physica Sinica, 2017, 66(18): 185202. DOI: 10.7498/aps.66.185202
Citation: Yang Yu, Tang Cheng-Shuang, Zhao Yi-Fan, Yu Yi-Qing, Xin Yu. Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequencyJ. Acta Physica Sinica, 2017, 66(18): 185202. DOI: 10.7498/aps.66.185202
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Electronegativity of capacitively coupled Ar+O2 plasma excited at very high frequency

Acta Phys. Sin., 2017, 66(18): 185202.
DOI: 10.7498/aps.66.185202
CSTR: 32037.14.aps.66.185202
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