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中国物理学会期刊
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Tang Wen-Hui, Liu Bang-Wu, Zhang Bo-Cheng, Li Min, Xia Yang. Low temperature depositions of GaN thin films by plasma-enhanced atomic layer depositionJ. Acta Physica Sinica, 2017, 66(9): 098101. DOI: 10.7498/aps.66.098101
Citation: Tang Wen-Hui, Liu Bang-Wu, Zhang Bo-Cheng, Li Min, Xia Yang. Low temperature depositions of GaN thin films by plasma-enhanced atomic layer depositionJ. Acta Physica Sinica, 2017, 66(9): 098101. DOI: 10.7498/aps.66.098101
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Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition

Acta Phys. Sin., 2017, 66(9): 098101.
DOI: 10.7498/aps.66.098101
CSTR: 32037.14.aps.66.098101
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