Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng. Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical sourceJ. Acta Physica Sinica, 2017, 66(9): 095203. DOI: 10.7498/aps.66.095203
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Citation:
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Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng. Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical sourceJ. Acta Physica Sinica, 2017, 66(9): 095203. DOI: 10.7498/aps.66.095203
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Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng. Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical sourceJ. Acta Physica Sinica, 2017, 66(9): 095203. DOI: 10.7498/aps.66.095203
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Citation:
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Cui Sui-Han, Wu Zhong-Zhen, Xiao Shu, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Paul K, Tan Wen-Chang, Pan Feng. Electromagnetic control and optimization of high power impulse magnetron sputtering discharges in cylindrical sourceJ. Acta Physica Sinica, 2017, 66(9): 095203. DOI: 10.7498/aps.66.095203
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