Femtosecond laser pulse energy accumulation optimization effect on surface morphology of black silicon

Tao Hai-Yan; Chen Rui; Song Xiao-Wei; Chen Ya-Nan; Lin Jing-Quan

doi:10.7498/aps.66.067902

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Tao Hai-Yan, Chen Rui, Song Xiao-Wei, Chen Ya-Nan, Lin Jing-Quan. Femtosecond laser pulse energy accumulation optimization effect on surface morphology of black siliconJ. Acta Physica Sinica, 2017, 66(6): 067902. DOI: 10.7498/aps.66.067902

Citation:

Tao Hai-Yan, Chen Rui, Song Xiao-Wei, Chen Ya-Nan, Lin Jing-Quan. Femtosecond laser pulse energy accumulation optimization effect on surface morphology of black siliconJ. Acta Physica Sinica, 2017, 66(6): 067902. DOI: 10.7498/aps.66.067902

Citation:

Tao Hai-Yan, Chen Rui, Song Xiao-Wei, Chen Ya-Nan, Lin Jing-Quan. Femtosecond laser pulse energy accumulation optimization effect on surface morphology of black siliconJ. Acta Physica Sinica, 2017, 66(6): 067902. DOI: 10.7498/aps.66.067902