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中国物理学会期刊
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Wang Qian, Zhao Jiang-Shan, Luo Shi-Wen, Zuo Du-Luo, Zhou Yi. Energy efficiency analysis of ArF excimer laser systemJ. Acta Physica Sinica, 2016, 65(21): 214205. DOI: 10.7498/aps.65.214205
Citation: Wang Qian, Zhao Jiang-Shan, Luo Shi-Wen, Zuo Du-Luo, Zhou Yi. Energy efficiency analysis of ArF excimer laser systemJ. Acta Physica Sinica, 2016, 65(21): 214205. DOI: 10.7498/aps.65.214205
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Energy efficiency analysis of ArF excimer laser system

Acta Phys. Sin., 2016, 65(21): 214205.
DOI: 10.7498/aps.65.214205
CSTR: 32037.14.aps.65.214205
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