Xiao Shu, Wu Zhong-Zhen, Cui Sui-Han, Liu Liang-Liang, Zheng Bo-Cong, Lin Hai, Ricky K Y Fu, Tian Xiu-Bo, Pan Feng, Paul K Chu. Cylindric high power impulse magnetron sputtering source and its discharge characteristicsJ. Acta Physica Sinica, 2016, 65(18): 185202. DOI: 10.7498/aps.65.185202