The microstructure and optical properties of SiNx deposited by linear microwave chemical vapor deposition

Zhang Jian; Ba De-Chun; Zhao Chong-Ling; Liu Kun; Du Guang-Yu

doi:10.7498/aps.64.067801

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Zhang Jian, Ba De-Chun, Zhao Chong-Ling, Liu Kun, Du Guang-Yu. The microstructure and optical properties of SiNx deposited by linear microwave chemical vapor depositionJ. Acta Physica Sinica, 2015, 64(6): 067801. DOI: 10.7498/aps.64.067801

Citation:

Zhang Jian, Ba De-Chun, Zhao Chong-Ling, Liu Kun, Du Guang-Yu. The microstructure and optical properties of SiNx deposited by linear microwave chemical vapor depositionJ. Acta Physica Sinica, 2015, 64(6): 067801. DOI: 10.7498/aps.64.067801

Citation:

Zhang Jian, Ba De-Chun, Zhao Chong-Ling, Liu Kun, Du Guang-Yu. The microstructure and optical properties of SiNx deposited by linear microwave chemical vapor depositionJ. Acta Physica Sinica, 2015, 64(6): 067801. DOI: 10.7498/aps.64.067801