Line-field parallel spectral domain optical coherence tomography and its application in defect inspection

Zhao Chen; Chen Zhi-Yan; Ding Zhi-Hua; Li Peng; Shen Yi; Ni Yang

doi:10.7498/aps.63.194201

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Zhao Chen, Chen Zhi-Yan, Ding Zhi-Hua, Li Peng, Shen Yi, Ni Yang. Line-field parallel spectral domain optical coherence tomography and its application in defect inspectionJ. Acta Physica Sinica, 2014, 63(19): 194201. DOI: 10.7498/aps.63.194201

Citation:

Zhao Chen, Chen Zhi-Yan, Ding Zhi-Hua, Li Peng, Shen Yi, Ni Yang. Line-field parallel spectral domain optical coherence tomography and its application in defect inspectionJ. Acta Physica Sinica, 2014, 63(19): 194201. DOI: 10.7498/aps.63.194201

Citation:

Zhao Chen, Chen Zhi-Yan, Ding Zhi-Hua, Li Peng, Shen Yi, Ni Yang. Line-field parallel spectral domain optical coherence tomography and its application in defect inspectionJ. Acta Physica Sinica, 2014, 63(19): 194201. DOI: 10.7498/aps.63.194201