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中国物理学会期刊
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Wu Zhong-Zhen, Tian Xiu-Bo, Pan Feng, Ricky K. Y. Fu, Paul K. Chu. Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltageJ. Acta Physica Sinica, 2014, 63(18): 185207. DOI: 10.7498/aps.63.185207
Citation: Wu Zhong-Zhen, Tian Xiu-Bo, Pan Feng, Ricky K. Y. Fu, Paul K. Chu. Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltageJ. Acta Physica Sinica, 2014, 63(18): 185207. DOI: 10.7498/aps.63.185207
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Enhanced discharge of high power pulsed magnetron sputtering coupling with high voltage

Acta Phys. Sin., 2014, 63(18): 185207.
DOI: 10.7498/aps.63.185207
CSTR: 32037.14.aps.63.185207
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