Investigations of high-quality aluminum film with large-area uniformity for large-size echelle grating

Li Zi-Zheng; Yang Hai-Gui; Wang Xiao-Yi; Gao Jin-Song

doi:10.7498/aps.63.157801

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Li Zi-Zheng, Yang Hai-Gui, Wang Xiao-Yi, Gao Jin-Song. Investigations of high-quality aluminum film with large-area uniformity for large-size echelle gratingJ. Acta Physica Sinica, 2014, 63(15): 157801. DOI: 10.7498/aps.63.157801

Citation:

Li Zi-Zheng, Yang Hai-Gui, Wang Xiao-Yi, Gao Jin-Song. Investigations of high-quality aluminum film with large-area uniformity for large-size echelle gratingJ. Acta Physica Sinica, 2014, 63(15): 157801. DOI: 10.7498/aps.63.157801

Citation:

Li Zi-Zheng, Yang Hai-Gui, Wang Xiao-Yi, Gao Jin-Song. Investigations of high-quality aluminum film with large-area uniformity for large-size echelle gratingJ. Acta Physica Sinica, 2014, 63(15): 157801. DOI: 10.7498/aps.63.157801