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中国物理学会期刊
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Cui Jian-Jun, Gao Si-Tian. Nanometer film thickness metrology and traceability based on grazing incidence X-ray reflectometryJ. Acta Physica Sinica, 2014, 63(6): 060601. DOI: 10.7498/aps.63.060601
Citation: Cui Jian-Jun, Gao Si-Tian. Nanometer film thickness metrology and traceability based on grazing incidence X-ray reflectometryJ. Acta Physica Sinica, 2014, 63(6): 060601. DOI: 10.7498/aps.63.060601
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Nanometer film thickness metrology and traceability based on grazing incidence X-ray reflectometry

Acta Phys. Sin., 2014, 63(6): 060601.
DOI: 10.7498/aps.63.060601
CSTR: 32037.14.aps.63.060601
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