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中国物理学会期刊
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Gao Yang-Fu, Song Yi-Xu, Sun Xiao-Min. An optimization method for ion etching yield modeling based on etching velocity matchingJ. Acta Physica Sinica, 2014, 63(4): 048201. DOI: 10.7498/aps.63.048201
Citation: Gao Yang-Fu, Song Yi-Xu, Sun Xiao-Min. An optimization method for ion etching yield modeling based on etching velocity matchingJ. Acta Physica Sinica, 2014, 63(4): 048201. DOI: 10.7498/aps.63.048201
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An optimization method for ion etching yield modeling based on etching velocity matching

Acta Phys. Sin., 2014, 63(4): 048201.
DOI: 10.7498/aps.63.048201
CSTR: 32037.14.aps.63.048201
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