Ma Zhi-Chao, Xu Zhi-Mou, Peng Jing, Sun Tang-You, Chen Xiu-Guo, Zhao Wen-Ning, Liu Si-Si, Wu Xing-Hui, Zou Chao, Liu Shi-Yuan. Nondestructive detection of nano grating by generalized ellipsometerJ. Acta Physica Sinica, 2014, 63(3): 039101. DOI: 10.7498/aps.63.039101
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Citation:
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Ma Zhi-Chao, Xu Zhi-Mou, Peng Jing, Sun Tang-You, Chen Xiu-Guo, Zhao Wen-Ning, Liu Si-Si, Wu Xing-Hui, Zou Chao, Liu Shi-Yuan. Nondestructive detection of nano grating by generalized ellipsometerJ. Acta Physica Sinica, 2014, 63(3): 039101. DOI: 10.7498/aps.63.039101
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Ma Zhi-Chao, Xu Zhi-Mou, Peng Jing, Sun Tang-You, Chen Xiu-Guo, Zhao Wen-Ning, Liu Si-Si, Wu Xing-Hui, Zou Chao, Liu Shi-Yuan. Nondestructive detection of nano grating by generalized ellipsometerJ. Acta Physica Sinica, 2014, 63(3): 039101. DOI: 10.7498/aps.63.039101
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Citation:
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Ma Zhi-Chao, Xu Zhi-Mou, Peng Jing, Sun Tang-You, Chen Xiu-Guo, Zhao Wen-Ning, Liu Si-Si, Wu Xing-Hui, Zou Chao, Liu Shi-Yuan. Nondestructive detection of nano grating by generalized ellipsometerJ. Acta Physica Sinica, 2014, 63(3): 039101. DOI: 10.7498/aps.63.039101
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