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Hu Xing-Lei, Sun Ya-Zhou, Liang Ying-Chun, Chen Jia-Xuan. Performance evolution process of machined surface of monocrystalline silicon micro/nanostructuresJ. Acta Physica Sinica, 2013, 62(22): 220704. DOI: 10.7498/aps.62.220704
Citation: Hu Xing-Lei, Sun Ya-Zhou, Liang Ying-Chun, Chen Jia-Xuan. Performance evolution process of machined surface of monocrystalline silicon micro/nanostructuresJ. Acta Physica Sinica, 2013, 62(22): 220704. DOI: 10.7498/aps.62.220704
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Performance evolution process of machined surface of monocrystalline silicon micro/nanostructures

Acta Phys. Sin., 2013, 62(22): 220704.
DOI: 10.7498/aps.62.220704
CSTR: 32037.14.aps.62.220704
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