Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputtering

Zhang Chi; Chen Xin-Liang; Wang Fei; Yan Cong-Bo; Huang Qian; Zhao Ying; Zhang Xiao-Dan; Geng Xin-Hua

doi:10.7498/aps.61.238101

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Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua. Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputteringJ. Acta Physica Sinica, 2012, 61(23): 238101. DOI: 10.7498/aps.61.238101

Citation:

Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua. Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputteringJ. Acta Physica Sinica, 2012, 61(23): 238101. DOI: 10.7498/aps.61.238101

Citation:

Zhang Chi, Chen Xin-Liang, Wang Fei, Yan Cong-Bo, Huang Qian, Zhao Ying, Zhang Xiao-Dan, Geng Xin-Hua. Temperature-dependant growth and properties of W-doped ZnO thin films deposited by reactive magnetron sputteringJ. Acta Physica Sinica, 2012, 61(23): 238101. DOI: 10.7498/aps.61.238101