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中国物理学会期刊
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Sun Li-Yuan, Gao Zhi-Yuan, Zou De-Shu, Zhang Lu, Ma Li, Tian Liang, Shen Guang-Di. The optimization of lithography process on the deep muti-stepped surfaceJ. Acta Physica Sinica, 2012, 61(20): 206801. DOI: 10.7498/aps.61.206801
Citation: Sun Li-Yuan, Gao Zhi-Yuan, Zou De-Shu, Zhang Lu, Ma Li, Tian Liang, Shen Guang-Di. The optimization of lithography process on the deep muti-stepped surfaceJ. Acta Physica Sinica, 2012, 61(20): 206801. DOI: 10.7498/aps.61.206801
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The optimization of lithography process on the deep muti-stepped surface

Acta Phys. Sin., 2012, 61(20): 206801.
DOI: 10.7498/aps.61.206801
CSTR: 32037.14.aps.61.206801
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