Mode transition of inductively coupled plasma in interlayer chamber

Du Yin-Chang; Cao Jin-Xiang; Wang Jian; Zheng Zhe; Liu Yu; Meng Guang; Ren Ai-Min; Zhang Sheng-Jun

doi:10.7498/aps.61.195206

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Du Yin-Chang, Cao Jin-Xiang, Wang Jian, Zheng Zhe, Liu Yu, Meng Guang, Ren Ai-Min, Zhang Sheng-Jun. Mode transition of inductively coupled plasma in interlayer chamberJ. Acta Physica Sinica, 2012, 61(19): 195206. DOI: 10.7498/aps.61.195206

Citation:

Du Yin-Chang, Cao Jin-Xiang, Wang Jian, Zheng Zhe, Liu Yu, Meng Guang, Ren Ai-Min, Zhang Sheng-Jun. Mode transition of inductively coupled plasma in interlayer chamberJ. Acta Physica Sinica, 2012, 61(19): 195206. DOI: 10.7498/aps.61.195206

Citation:

Du Yin-Chang, Cao Jin-Xiang, Wang Jian, Zheng Zhe, Liu Yu, Meng Guang, Ren Ai-Min, Zhang Sheng-Jun. Mode transition of inductively coupled plasma in interlayer chamberJ. Acta Physica Sinica, 2012, 61(19): 195206. DOI: 10.7498/aps.61.195206