Reliability of SiN-based MIM capacitors in GaN MMIC

Wang Xin-Hua; Wang Jian-Hui; Pang Lei; Chen Xiao-Juan; Yuan Ting-Ting; Luo Wei-Jun; Liu Xin-Yu

doi:10.7498/aps.61.177302

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Wang Xin-Hua, Wang Jian-Hui, Pang Lei, Chen Xiao-Juan, Yuan Ting-Ting, Luo Wei-Jun, Liu Xin-Yu. Reliability of SiN-based MIM capacitors in GaN MMICJ. Acta Physica Sinica, 2012, 61(17): 177302. DOI: 10.7498/aps.61.177302

Citation:

Wang Xin-Hua, Wang Jian-Hui, Pang Lei, Chen Xiao-Juan, Yuan Ting-Ting, Luo Wei-Jun, Liu Xin-Yu. Reliability of SiN-based MIM capacitors in GaN MMICJ. Acta Physica Sinica, 2012, 61(17): 177302. DOI: 10.7498/aps.61.177302

Citation:

Wang Xin-Hua, Wang Jian-Hui, Pang Lei, Chen Xiao-Juan, Yuan Ting-Ting, Luo Wei-Jun, Liu Xin-Yu. Reliability of SiN-based MIM capacitors in GaN MMICJ. Acta Physica Sinica, 2012, 61(17): 177302. DOI: 10.7498/aps.61.177302