The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ion

Han Liang; Ning Tao; Liu De-Lian; He Liang

doi:10.7498/aps.61.176801

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Han Liang, Ning Tao, Liu De-Lian, He Liang. The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ionJ. Acta Physica Sinica, 2012, 61(17): 176801. DOI: 10.7498/aps.61.176801

Citation:

Han Liang, Ning Tao, Liu De-Lian, He Liang. The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ionJ. Acta Physica Sinica, 2012, 61(17): 176801. DOI: 10.7498/aps.61.176801

Citation:

Han Liang, Ning Tao, Liu De-Lian, He Liang. The study on the stress and the friction coefficient of tetrahedral amorphous carbon films bombarded by energetic Ar ionJ. Acta Physica Sinica, 2012, 61(17): 176801. DOI: 10.7498/aps.61.176801