Zhou Xiao-Wei, Liu Ying, Xu Xiang-Dong, Qiu Ke-Qiang, Liu Zhen-Kun, Hong Yi-Ling, Fu Shao-Jun. Diffraction efficiency measurement of large aperture multilayer dielectric grating and its application in the fabrication processJ. Acta Physica Sinica, 2012, 61(17): 174203. DOI: 10.7498/aps.61.174203