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Li Yan-Yang, Yang Shi-E, Chen Yong-Sheng, Zhou Jian-Peng, Li Xin-Li, Lu Jing-Xiao. The study of capacitively-coupled hydrogen plasma at very high frequencyJ. Acta Physica Sinica, 2012, 61(16): 165203. DOI: 10.7498/aps.61.165203
Citation: Li Yan-Yang, Yang Shi-E, Chen Yong-Sheng, Zhou Jian-Peng, Li Xin-Li, Lu Jing-Xiao. The study of capacitively-coupled hydrogen plasma at very high frequencyJ. Acta Physica Sinica, 2012, 61(16): 165203. DOI: 10.7498/aps.61.165203
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The study of capacitively-coupled hydrogen plasma at very high frequency

Acta Phys. Sin., 2012, 61(16): 165203.
DOI: 10.7498/aps.61.165203
CSTR: 32037.14.aps.61.165203
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