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中国物理学会期刊
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Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun. Computer simulation of the glow discharge characteristics in magnetron sputteringJ. Acta Physica Sinica, 2012, 61(16): 165101. DOI: 10.7498/aps.61.165101
Citation: Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun. Computer simulation of the glow discharge characteristics in magnetron sputteringJ. Acta Physica Sinica, 2012, 61(16): 165101. DOI: 10.7498/aps.61.165101
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Computer simulation of the glow discharge characteristics in magnetron sputtering

Acta Phys. Sin., 2012, 61(16): 165101.
DOI: 10.7498/aps.61.165101
CSTR: 32037.14.aps.61.165101
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