Zou Shuai, Tang Zhong-Hua, Ji Liang-Liang, Su Xiao-Dong, Xin Yu. Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasmaJ. Acta Physica Sinica, 2012, 61(7): 075204. DOI: 10.7498/aps.61.075204