Chen Chao, Ji Yong, Gao Xiao-Yong, Zhao Meng-Ke, Ma Jiao-Min, Zhang Zeng-Yuan, Lu Jing-Xiao. Study on the deposition of aluminum-doped zinc oxide films using direct-current pulse magnetron reactive sputtering techniqueJ. Acta Physica Sinica, 2012, 61(3): 036104. DOI: 10.7498/aps.61.036104