Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputteringJ. Acta Physica Sinica, 2012, 61(2): 028104. DOI: 10.7498/aps.61.028104
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Citation:
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Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputteringJ. Acta Physica Sinica, 2012, 61(2): 028104. DOI: 10.7498/aps.61.028104
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Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputteringJ. Acta Physica Sinica, 2012, 61(2): 028104. DOI: 10.7498/aps.61.028104
|
Citation:
|
Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputteringJ. Acta Physica Sinica, 2012, 61(2): 028104. DOI: 10.7498/aps.61.028104
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