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Wang Feng, Wu Wei-Dong, Jiang Xiao-Dong, Tang Yong-Jian. Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etchingJ. Acta Physica Sinica, 2012, 61(2): 024206. DOI: 10.7498/aps.61.024206
Citation: Wang Feng, Wu Wei-Dong, Jiang Xiao-Dong, Tang Yong-Jian. Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etchingJ. Acta Physica Sinica, 2012, 61(2): 024206. DOI: 10.7498/aps.61.024206
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Surface crystallization of amorphous fused silica during electron cyclotron resonance plasma etching

Acta Phys. Sin., 2012, 61(2): 024206.
DOI: 10.7498/aps.61.024206
CSTR: 32037.14.aps.61.024206
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