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Zhou Hua-Jie, Xu Qiu-Xia. Ni-FUSI metal gate work function modulation technologyJ. Acta Physica Sinica, 2011, 60(10): 108102. DOI: 10.7498/aps.60.108102
Citation: Zhou Hua-Jie, Xu Qiu-Xia. Ni-FUSI metal gate work function modulation technologyJ. Acta Physica Sinica, 2011, 60(10): 108102. DOI: 10.7498/aps.60.108102
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Ni-FUSI metal gate work function modulation technology

Acta Phys. Sin., 2011, 60(10): 108102.
DOI: 10.7498/aps.60.108102
CSTR: 32037.14.aps.60.108102
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