Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputtering

Li Lin-Na; Chen Xin-Liang; Wang Fei; Sun Jian; Zhang De-Kun; Geng Xin-Hua; Zhao Ying

doi:10.7498/aps.60.067304

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Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying. Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputteringJ. Acta Physica Sinica, 2011, 60(6): 067304. DOI: 10.7498/aps.60.067304

Citation:

Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying. Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputteringJ. Acta Physica Sinica, 2011, 60(6): 067304. DOI: 10.7498/aps.60.067304

Citation:

Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying. Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputteringJ. Acta Physica Sinica, 2011, 60(6): 067304. DOI: 10.7498/aps.60.067304