Three-dimensional simulation of total dose effects on ultra-deep submicron devices

He Bao-Ping; Ding Li-Li; Yao Zhi-Bin; Xiao Zhi-Gang; Huang Shao-Yan; Wang Zu-Jun

doi:10.7498/aps.60.056105

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He Bao-Ping, Ding Li-Li, Yao Zhi-Bin, Xiao Zhi-Gang, Huang Shao-Yan, Wang Zu-Jun. Three-dimensional simulation of total dose effects on ultra-deep submicron devicesJ. Acta Physica Sinica, 2011, 60(5): 056105. DOI: 10.7498/aps.60.056105

Citation:

He Bao-Ping, Ding Li-Li, Yao Zhi-Bin, Xiao Zhi-Gang, Huang Shao-Yan, Wang Zu-Jun. Three-dimensional simulation of total dose effects on ultra-deep submicron devicesJ. Acta Physica Sinica, 2011, 60(5): 056105. DOI: 10.7498/aps.60.056105

Citation:

He Bao-Ping, Ding Li-Li, Yao Zhi-Bin, Xiao Zhi-Gang, Huang Shao-Yan, Wang Zu-Jun. Three-dimensional simulation of total dose effects on ultra-deep submicron devicesJ. Acta Physica Sinica, 2011, 60(5): 056105. DOI: 10.7498/aps.60.056105