Zhang En-Xia, Tang Hai-Ma, Zheng Zhong-Shan, Yu Fang, Li Ning, Wang Ning-Juan, Li Guo-Hua, Ma Hong-Zhi. Influence of high-dose nitrogen implantation on the positive charge density of the buried oxide of silicon-on-insulator wafersJ. Acta Physica Sinica, 2011, 60(5): 056104. DOI: 10.7498/aps.60.056104