Search

x
中国物理学会期刊
Advanced Search
An Tao, Wang Li-Li, Wen Mao, Zheng Wei-Tao. Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatingsJ. Acta Physica Sinica, 2011, 60(1): 016801. DOI: 10.7498/aps.60.016801
Citation: An Tao, Wang Li-Li, Wen Mao, Zheng Wei-Tao. Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatingsJ. Acta Physica Sinica, 2011, 60(1): 016801. DOI: 10.7498/aps.60.016801
shu

Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

Acta Phys. Sin., 2011, 60(1): 016801.
DOI: 10.7498/aps.60.016801
CSTR: 32037.14.aps.60.016801
PDF
Get Citation

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return
    Baidu
    map