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中国物理学会期刊
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Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang. Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct currentJ. Acta Physica Sinica, 2011, 60(1): 015204. DOI: 10.7498/aps.60.015204
Citation: Mu Zong-Xin, Mu Xiao-Dong, Wang Chun, Jia Li, Dong Chuang. Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct currentJ. Acta Physica Sinica, 2011, 60(1): 015204. DOI: 10.7498/aps.60.015204
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Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current

Acta Phys. Sin., 2011, 60(1): 015204.
DOI: 10.7498/aps.60.015204
CSTR: 32037.14.aps.60.015204
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