Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering

Wang Pei-Jun; Jiang Mei-Fu; Du Ji-Long; Dai Yong-Feng

doi:10.7498/aps.59.8920

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Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputteringJ. Acta Physica Sinica, 2010, 59(12): 8920-8926. DOI: 10.7498/aps.59.8920

Citation:

Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputteringJ. Acta Physica Sinica, 2010, 59(12): 8920-8926. DOI: 10.7498/aps.59.8920

Citation:

Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputteringJ. Acta Physica Sinica, 2010, 59(12): 8920-8926. DOI: 10.7498/aps.59.8920