Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilution

Song Jie; Guo Yan-Qing; Wang Xiang; Ding Hong-Lin; Huang Rui

doi:10.7498/aps.59.7378

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Song Jie, Guo Yan-Qing, Wang Xiang, Ding Hong-Lin, Huang Rui. Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilutionJ. Acta Physica Sinica, 2010, 59(10): 7378-7382. DOI: 10.7498/aps.59.7378

Citation:

Song Jie, Guo Yan-Qing, Wang Xiang, Ding Hong-Lin, Huang Rui. Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilutionJ. Acta Physica Sinica, 2010, 59(10): 7378-7382. DOI: 10.7498/aps.59.7378

Citation:

Song Jie, Guo Yan-Qing, Wang Xiang, Ding Hong-Lin, Huang Rui. Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilutionJ. Acta Physica Sinica, 2010, 59(10): 7378-7382. DOI: 10.7498/aps.59.7378