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中国物理学会期刊
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Yuan He, Sun Chang-Zheng, Xu Jian-Ming, Wu Qing, Xiong Bing, Luo Yi. Design and fabrication of multilayer antireflection coating for optoelectronic devices by plasma enhanced chemical vapor depositionJ. Acta Physica Sinica, 2010, 59(10): 7239-7244. DOI: 10.7498/aps.59.7239
Citation: Yuan He, Sun Chang-Zheng, Xu Jian-Ming, Wu Qing, Xiong Bing, Luo Yi. Design and fabrication of multilayer antireflection coating for optoelectronic devices by plasma enhanced chemical vapor depositionJ. Acta Physica Sinica, 2010, 59(10): 7239-7244. DOI: 10.7498/aps.59.7239
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Design and fabrication of multilayer antireflection coating for optoelectronic devices by plasma enhanced chemical vapor deposition

Acta Phys. Sin., 2010, 59(10): 7239-7244.
DOI: 10.7498/aps.59.7239
CSTR: 32037.14.aps.59.7239
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