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中国物理学会期刊
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Mu Zong-Xin, Mu Xiao-Dong, Jia Li, Wang Chun, Dong Chuang. Electrostatic oscillation and coupling resonance in double trap of unbalanced magnetron sputteringJ. Acta Physica Sinica, 2010, 59(10): 7164-7169. DOI: 10.7498/aps.59.7164
Citation: Mu Zong-Xin, Mu Xiao-Dong, Jia Li, Wang Chun, Dong Chuang. Electrostatic oscillation and coupling resonance in double trap of unbalanced magnetron sputteringJ. Acta Physica Sinica, 2010, 59(10): 7164-7169. DOI: 10.7498/aps.59.7164
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Electrostatic oscillation and coupling resonance in double trap of unbalanced magnetron sputtering

Acta Phys. Sin., 2010, 59(10): 7164-7169.
DOI: 10.7498/aps.59.7164
CSTR: 32037.14.aps.59.7164
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