Fabrication and luminescence properties of Si quantum dots based on Si-rich SiNx/N-rich SiNy multilayer

Huang Rui; Wang Dan-Qing; Song Jie; Ding Hong-Lin; Wang Xiang; Guo Yan-Qing; Chen Kun-Ji; Xu Jun; Li Wei; Ma Zhong-Yuan

doi:10.7498/aps.59.5823

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Huang Rui, Wang Dan-Qing, Song Jie, Ding Hong-Lin, Wang Xiang, Guo Yan-Qing, Chen Kun-Ji, Xu Jun, Li Wei, Ma Zhong-Yuan. Fabrication and luminescence properties of Si quantum dots based on Si-rich SiNx/N-rich SiNy multilayerJ. Acta Physica Sinica, 2010, 59(8): 5823-5827. DOI: 10.7498/aps.59.5823

Citation:

Huang Rui, Wang Dan-Qing, Song Jie, Ding Hong-Lin, Wang Xiang, Guo Yan-Qing, Chen Kun-Ji, Xu Jun, Li Wei, Ma Zhong-Yuan. Fabrication and luminescence properties of Si quantum dots based on Si-rich SiNx/N-rich SiNy multilayerJ. Acta Physica Sinica, 2010, 59(8): 5823-5827. DOI: 10.7498/aps.59.5823

Citation:

Huang Rui, Wang Dan-Qing, Song Jie, Ding Hong-Lin, Wang Xiang, Guo Yan-Qing, Chen Kun-Ji, Xu Jun, Li Wei, Ma Zhong-Yuan. Fabrication and luminescence properties of Si quantum dots based on Si-rich SiNx/N-rich SiNy multilayerJ. Acta Physica Sinica, 2010, 59(8): 5823-5827. DOI: 10.7498/aps.59.5823