Growth and character stics of AlGaN/GaN HEMT structures with AlN/GaN superlattices as barrier layers

Ding Guo-Jian; Guo Li-Wei; Xing Zhi-Gang; Chen Yao; Xu Pei-Qiang; Jia Hai-Qiang; Zhou Jun-Ming; Chen Hong

doi:10.7498/aps.59.5724

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Ding Guo-Jian, Guo Li-Wei, Xing Zhi-Gang, Chen Yao, Xu Pei-Qiang, Jia Hai-Qiang, Zhou Jun-Ming, Chen Hong. Growth and character stics of AlGaN/GaN HEMT structures with AlN/GaN superlattices as barrier layersJ. Acta Physica Sinica, 2010, 59(8): 5724-5729. DOI: 10.7498/aps.59.5724

Citation:

Ding Guo-Jian, Guo Li-Wei, Xing Zhi-Gang, Chen Yao, Xu Pei-Qiang, Jia Hai-Qiang, Zhou Jun-Ming, Chen Hong. Growth and character stics of AlGaN/GaN HEMT structures with AlN/GaN superlattices as barrier layersJ. Acta Physica Sinica, 2010, 59(8): 5724-5729. DOI: 10.7498/aps.59.5724

Citation:

Ding Guo-Jian, Guo Li-Wei, Xing Zhi-Gang, Chen Yao, Xu Pei-Qiang, Jia Hai-Qiang, Zhou Jun-Ming, Chen Hong. Growth and character stics of AlGaN/GaN HEMT structures with AlN/GaN superlattices as barrier layersJ. Acta Physica Sinica, 2010, 59(8): 5724-5729. DOI: 10.7498/aps.59.5724