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Hu Jia, Xu Yi-Jun, Ye Chao. CHF3 dual-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2010, 59(4): 2661-2665. DOI: 10.7498/aps.59.2661
Citation: Hu Jia, Xu Yi-Jun, Ye Chao. CHF3 dual-frequency capacitively coupled plasmaJ. Acta Physica Sinica, 2010, 59(4): 2661-2665. DOI: 10.7498/aps.59.2661
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CHF3 dual-frequency capacitively coupled plasma

Acta Phys. Sin., 2010, 59(4): 2661-2665.
DOI: 10.7498/aps.59.2661
CSTR: 32037.14.aps.59.2661
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